Bandwidth-Enhanced Oversampling Successive Approximation Readout Technique for Low-Noise Power-Efficient MEMS Capacitive Accelerometer

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

MEMS Accelerometer Readout

You work in a characterization laboratory af a MEMS company, and you have to design an electronic board in order to test a given capacitive accelerometer. The application of the sensor is vibration monitoring on a mechanical engine in a specific frequency range (from 40 Hz to 400 Hz). The MEMS device has a mass of 8nK g , a mechanical stiffness of 5N /m and a quality factor Q = 2. The capacitiv...

متن کامل

Design of Low Noise Readout Amplifiers for Monolithic Capacitive CMOS-MEMS Accelerometers

This thesis report describes the design process, the implementation and the simulation and measurement results of two different readout circuits to be used with two monolithic MEMS accelerometers fabricated by post-CMOS surface micromachining based on isotropic wet etching in IHP SiGe 0,25 μm technology. The first design is used with a 50 fF z-axis sensor and the second design with a 200 fF sen...

متن کامل

Cmos Readout Interfaces for Mems Capacitive Microphones

This dissertation demonstrates the feasibility of three novel low-power and low-noise schemes for the readout interfaces of MEMS Capacitive Microphones (MCM) by presenting their detailed design descriptions and measurement results as application-specific ICs (ASIC) in CMOS technology developed to exploit their application scope in consumer electronics and hearing aids. MCMs are a new generation...

متن کامل

Chopper Stabilized, Low-Power, Low-Noise, Front End Interface Circuit for Capacitive CMOS MEMS Sensor Applications

In this paper, a chopper stabilized fully differential CMOS pre-amplifier circuit is presented. The proposed circuit is designed for sub-atto Farad capacitive CMOS MEMS sensing applications. Chopper stabilization technique is employed to minimize flicker (1/f) noise and offsets in the circuit. The proposed circuit is designed using MIMOS 0.35 μm AMS CMOS 3.3 V technology and simulation results ...

متن کامل

A Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50- g= Hz Monolithic CMOS MEMS Accelerometer

This paper describes a CMOS capacitive sensing amplifier for a monolithic MEMS accelerometer fabricated by post-CMOS surface micromachining. This chopper stabilized amplifier employs capacitance matching with optimal transistor sizing to minimize sensor noise floor. Offsets due to sensor and circuit are reduced by ac offset calibration and dc offset cancellation based on a differential differen...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: IEEE Journal of Solid-State Circuits

سال: 2020

ISSN: 0018-9200,1558-173X

DOI: 10.1109/jssc.2020.3005811